1st April 2021
X-PIC project starts
October 2022
integrated EUV-SXR source prototype READY
April 2023
OPCPA LASER source READY (M24)
October 2023
integrated IR filter, EUV-SXR beam splitters and delay lines READ
April 2024
EUV lithography & nanometrology integrated devices READY (Month 36)
April 2025
DELIVERY OF Market research report